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Irradiation-Damages in Atmospheric Plasma Used in a Resist Ashing Process for Thin Film Transistors
Sato, Taiki, Ueno, Akira, Yara, Takuya, Miyamoto, Eiji, Uraoka, Yukiharu, Kubota, Tomohiro, Samukawa, SeijiVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.03B009
Date:
March, 2009
File:
PDF, 234 KB
english, 2009