Radio Frequency Micro Electro Mechanical Systems Inductor...

Japanese Journal of Applied Physics 2010 / 5 Vol. 49; Iss. 5

Radio Frequency Micro Electro Mechanical Systems Inductor Configurations for Achieving Large Inductance Variations and High Q -factors

Mizuochi, Yutaka, Amakawa, Shuhei, Ishihara, Noboru, Masu, Kazuya
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.05FG02
Date:
May, 2010
File:
PDF, 344 KB
english, 2010
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