Study of the Removal of Ion-Implanted Resists Using Wet...

Japanese Journal of Applied Physics 2012 / 1 Vol. 51

Study of the Removal of Ion-Implanted Resists Using Wet Ozone

Goto, Yousuke, Angata, Yukihiro, Igarashi, Masanori, Yamamoto, Masashi, Nobuta, Takuya, Iida, Takayuki, Kono, Akihiko, Horibe, Hideo
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.026504
Date:
January, 2012
File:
PDF, 1.76 MB
english, 2012
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