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Dry Etching of Lead-Free (K,Na)NbO$_{3}$ Piezoelectric Films by Ar/C$_{4}$F$_{8}$ Plasma
Horikiri, Fumimasa, Shibata, Kenji, Suenaga, Kazufumi, Watanabe, Kazutoshi, Nomoto, Akira, Mishima, Tomoyoshi, Kurokawa, Fumiya, Kanno, IsakuVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.076202
Date:
June, 2012
File:
PDF, 573 KB
english, 2012