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CMOS integrated poly-sigemems accelerometer above 0.18 µm technology
A. Ray Chaudhuri, P. Helin, R. Van Den Hoven, S. Severi, X. Rottenberg, R. Yazicioglu, A. Witvrouw, L. Francis, H. TilmansYear:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7180848
File:
PDF, 1.31 MB
english, 2015