Reflow of PSG Layers by Halogen Lamp Short Duration Heating...

Japanese Journal of Applied Physics 1984 / 7 Vol. 23; Iss. Part 2, No

Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique

Hara, Tohru, Suzuki, Hidenori, Furukawa, Masakazu
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Volume:
23
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L452
Date:
July, 1984
File:
PDF, 420 KB
english, 1984
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