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Si Surface Cleaning by Si 2 H 6 –H 2 Gas Etching and Its Effects on Solid-Phase Epitaxy
Kunii, Yasuo, Sakakibara, YutakaVolume:
26
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.26.1816
Date:
November, 1987
File:
PDF, 352 KB
english, 1987