Experimental and Theoretical Study of the Charge Build-Up...

Japanese Journal of Applied Physics 1990 / 10 Vol. 29; Iss. Part 1, No

Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher

Namura, Takashi, Okada, Hiroyuki, Naitoh, Yasushi, Todokoro, Yoshihiro, Inoue, Morio
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.2251
Date:
October, 1990
File:
PDF, 774 KB
english, 1990
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