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{111} Facet Formation during Lateral Solid-Phase Epitaxy of Silicon
Ueno, Tomo, Kawai, Kenji, Morisawa, Toru, Hatano, Takahiro, Kunii, Yasuo, Ohdomari, IwaoVolume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.2322
Date:
August, 1992
File:
PDF, 1.33 MB
1992