{111} Facet Formation during Lateral Solid-Phase Epitaxy of...

Japanese Journal of Applied Physics 1992 / 8 Vol. 31; Iss. Part 1, No

{111} Facet Formation during Lateral Solid-Phase Epitaxy of Silicon

Ueno, Tomo, Kawai, Kenji, Morisawa, Toru, Hatano, Takahiro, Kunii, Yasuo, Ohdomari, Iwao
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.2322
Date:
August, 1992
File:
PDF, 1.33 MB
1992
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