Fabrication of Silicon Field Emitter Arrays Integrated with...

Fabrication of Silicon Field Emitter Arrays Integrated with Beam Focusing Lens

Yamaoka, Yoshikazu, Kanemaru, Seigo, Itoh, Junji
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.6626
Date:
December, 1996
File:
PDF, 1.31 MB
1996
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