Optical Emission Diagnostic of Laser-Induced Plasma during...

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 1, No

Optical Emission Diagnostic of Laser-Induced Plasma during C N X Film Deposition

Aldea, Eugen, Caricato, Anna Paola, Dinescu, Gheorghe, Luches, Armando, Perrone, Alessio
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4686
Date:
July, 1997
File:
PDF, 644 KB
1997
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