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Positive Ions in C 4 F 8 RF Discharge in a Planar Diode
Sasaki, Shinya, Hirose, Yuji, Ishikawa, Itsuo, Nagaseki, Kazuya, Saito, Yukinori, Suganomata, ShinjiVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.5296
Date:
August, 1997
File:
PDF, 198 KB
english, 1997