Sputtering Highly C-Axis-Oriented AlN Films on Y-128°...

Japanese Journal of Applied Physics 2000 / 6 Vol. 39; Iss. Part 2, No

Sputtering Highly C-Axis-Oriented AlN Films on Y-128° LiNbO3

Wu, Long, Chen, Ping-Cheng, Wu, Sean, Song, Hong-Tie, Chure, Ming-Cherng
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.L545
Date:
June, 2000
File:
PDF, 802 KB
english, 2000
Conversion to is in progress
Conversion to is failed