Study of Gate Length Dependence of Two-dimensional Carrier Profile in N-FET by Scanning Tunneling Microscopy
Fukutome, Hidenobu, Aoyama, Takayuki, Arimoto, HiroshiVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2395
Date:
April, 2005
File:
PDF, 141 KB
english, 2005