Highly Reliable Piezoelectric Actuator for Precision Stage...

Japanese Journal of Applied Physics 2005 / 5 Vol. 44; Iss. 5A

Highly Reliable Piezoelectric Actuator for Precision Stage System

Hashiguchi, Hiroyuki, Egashira, Yoshiya, Furukawa, Hiroyuki, Endo, Taishi, Kosaka, Tetsuya, Kosaka, Koji, Uozumi, Kiyohiko, Watanabe, Masayuki, Yamakawa, Takahiro, Miyata, Noboru, Nakada, Akira, Kubot
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Volume:
44
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.3307
Date:
May, 2005
File:
PDF, 989 KB
2005
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