Thermal Direct Mastering Using Deep UV Laser

Japanese Journal of Applied Physics 2006 / 2 Vol. 45; Iss. 2B

Thermal Direct Mastering Using Deep UV Laser

Sakai, Toshihiko, Nakano, Ikuo, Shimo, Masanori, Takamori, Nobuyuki, Takahashi, Akira
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Volume:
45
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.1407
Date:
February, 2006
File:
PDF, 531 KB
2006
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