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Low-Temperature Sintering of Indium Tin Oxide Thin Film Using Split Gliding Arc Plasma
Ito, Yukikazu, Shiki, Hajime, Takikawa, Hirofumi, Ootsuka, Takeshi, Okawa, Takashi, Yamanaka, Shigenobu, Usuki, EijiVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6956
Date:
August, 2008
File:
PDF, 373 KB
english, 2008