Fluorinated-Polymer Based High Sensitivity Extreme...

Japanese Journal of Applied Physics 2010 / 6 Vol. 49; Iss. 6

Fluorinated-Polymer Based High Sensitivity Extreme Ultraviolet Resists

Santillan, Julius Joseph, Yamashita, Tsuneo, Morita, Masamichi, Tanaka, Yoshito, Itani, Toshiro
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.06GF01
Date:
June, 2010
File:
PDF, 291 KB
english, 2010
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