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Surface and Interface Modifications of Aluminum Thin Films on Silica Glass Substrate Using 157 nm F 2 Laser for Selective Metallization
Iwai, Kazufumi, Okoshi, Masayuki, Nojiri, Hidetoshi, Inoue, NarumiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.022702
Date:
February, 2011
File:
PDF, 506 KB
english, 2011