F$_{2}$-Laser-Induced Modification of Aluminum Thin Films...

Japanese Journal of Applied Physics 2012 / 11 Vol. 51

F$_{2}$-Laser-Induced Modification of Aluminum Thin Films into Transparent Aluminum Oxide

Okoshi, Masayuki, Iwai, Kazufumi, Nojiri, Hidetoshi, Inoue, Narumi
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.122701
Date:
November, 2012
File:
PDF, 1.12 MB
english, 2012
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