Observation of Partial Dislocations of a Screw Type in Epitaxial Silicon Layers
Kumagawa, Masashi, Sunami, Hideo, Nishizawa, Jun-ichiVolume:
7
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.7.1296
Date:
October, 1968
File:
PDF, 670 KB
english, 1968