Direct UV patterning of thick hybrid glass films for...

Electronics Letters 2000 Vol. 36; Iss. 6

Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures

Rantala, J.T., Levy, R., Kivimäki, L., Descour, M.R.
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Volume:
36
Year:
2000
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:20000429
File:
PDF, 194 KB
english, 2000
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