Comparison study of physical vapor-deposited and chemical vapor-deposited titanium nitride thin films using X-ray photoelectron spectroscopy
Jin Zhao, E.Gene Garza, Kinsang Lam, Clive M JonesVolume:
158
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(00)00024-6
File:
PDF, 197 KB
english, 2000