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Microfabrication: LIGA-X and applications
R.K. Kupka, F. Bouamrane, C. Cremers, S. MegtertVolume:
164
Year:
2000
Language:
english
Pages:
14
DOI:
10.1016/s0169-4332(00)00354-8
File:
PDF, 1.33 MB
english, 2000