Growth characteristics of sputter-deposited thin films

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Growth characteristics of sputter-deposited thin films

M. Huth, S. Reber, C. Heske, P. Schicketanz, J. Hessert, P. Gegenwart, H. Adrian
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Year:
1996
Language:
english
DOI:
10.1088/0953-8984/8/45/013
File:
PDF, 270 KB
english, 1996
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