Palladium thin film deposition from liquid precursors on polymers by projected excimer beams
K. Kordás, L. Nánai, K. Bali, K. Stépán, R. Vajtai, T.F. George, S. LeppävuoriVolume:
168
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(00)00592-4
File:
PDF, 1.04 MB
english, 2000