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A micromachined dual-axis beam steering actuator for use in a miniaturized optical space communication system
K. Palmer, S. Lotfi, M. Berglund, G. Thornell, H. KratzYear:
2010
Language:
english
DOI:
10.1088/0960-1317/20/10/105007
File:
PDF, 911 KB
english, 2010