Implications of electron heating and non-uniformities in a...

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Implications of electron heating and non-uniformities in a VHF-CCP for sterilization of medical instruments

K. Stapelmann, M. Fiebrandt, T. Styrnoll, S. Baldus, N. Bibinov, P. Awakowicz
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Year:
2015
Language:
english
DOI:
10.1088/0963-0252/24/3/034014
File:
PDF, 789 KB
english, 2015
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