Implications of electron heating and non-uniformities in a VHF-CCP for sterilization of medical instruments
K. Stapelmann, M. Fiebrandt, T. Styrnoll, S. Baldus, N. Bibinov, P. AwakowiczYear:
2015
Language:
english
DOI:
10.1088/0963-0252/24/3/034014
File:
PDF, 789 KB
english, 2015