Ion beam induced reaction of carbon films on Si(1 0 0)
Hishita, Shunichi, Aizawa, Takashi, Suehara, Shigeru, Haneda, HajimeVolume:
169-170
Language:
english
Pages:
4
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00677-2
Date:
January, 2001
File:
PDF, 159 KB
english, 2001