Effect of dc bias on the compositional ratio of WNX thin films prepared by rf-dc coupled magnetron sputtering
Migita, T., Kamei, R., Tanaka, T., Kawabata, K.Volume:
169-170
Language:
english
Pages:
4
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00683-8
Date:
January, 2001
File:
PDF, 123 KB
english, 2001