Influence of UV light irradiation on film thickness distribution of tin oxide films by photochemical vapour deposition
Tamura, S., Ishida, T., Magara, H., Mihara, T., Mochizuki, S., Tatsuta, T.Volume:
169-170
Language:
english
Pages:
3
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00697-8
Date:
January, 2001
File:
PDF, 111 KB
english, 2001