Optical and electrical properties of Ge-implanted SiO2...

Applied Surface Science 2001 / 1 Vol. 169-170

Optical and electrical properties of Ge-implanted SiO2 layers on n-Si and p-Si

Lee, W.S., Jeong, J.Y., Kim, H.B., Chae, K.H., Whang, C.N., Im, S., Song, J.H.
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Volume:
169-170
Language:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00704-2
Date:
January, 2001
File:
PDF, 139 KB
english, 2001
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