Properties of amorphous ternary alloy films a-SixCyGez:H prepared by magnetron co-sputtering
Saito, N., Nakaaki, I., Nakamura, S., Yoshioka, S., Yamaguchi, T.Volume:
169-170
Language:
english
Pages:
4
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00730-3
Date:
January, 2001
File:
PDF, 119 KB
english, 2001