The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
Igasaki, Yasuhiro, Naito, Takashi, Murakami, Kenji, Tomoda, WaichiVolume:
169-170
Language:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00749-2
Date:
January, 2001
File:
PDF, 121 KB
english, 2001