Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps
Jun-Ying Zhang, B. Hopp, Z. Geretovszky, Ian W. BoydVolume:
168
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(00)00768-6
File:
PDF, 182 KB
english, 2000