Studies on reactive sputtering process of TiN films using...

Studies on reactive sputtering process of TiN films using small mass analyzers

Banno, Tatsuya, Michizono, Shinichiro, Saito, Yoshio
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
169-170
Language:
english
Pages:
6
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00786-8
Date:
January, 2001
File:
PDF, 264 KB
english, 2001
Conversion to is in progress
Conversion to is failed