Studies on reactive sputtering process of TiN films using small mass analyzers
Banno, Tatsuya, Michizono, Shinichiro, Saito, YoshioVolume:
169-170
Language:
english
Pages:
6
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00786-8
Date:
January, 2001
File:
PDF, 264 KB
english, 2001