Characteristics of time modulated surface wave argon plasma
Ohgushi, Tomonori, Okamoto, Tetsu, Watanabe, Seiichi, Okamoto, YukioVolume:
169-170
Language:
english
Pages:
6
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00795-9
Date:
January, 2001
File:
PDF, 331 KB
english, 2001