Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures
Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Kaupo Kukli, Mikael SchuiskyVolume:
173
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(00)00859-x
File:
PDF, 180 KB
english, 2001