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Phase transformations in hafnium dioxide thin films grown...

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Kaupo Kukli, Mikael Schuisky
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Volume:
173
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(00)00859-x
File:
PDF, 180 KB
english, 2001
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