Influence of sputtering pressure on the structure and...

Influence of sputtering pressure on the structure and properties of ZrO2 films prepared by rf reactive sputtering

Pengtao Gao, L.J. Meng, M.P. dos Santos, V. Teixeira, M. Andritschky
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Volume:
173
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(00)00888-6
File:
PDF, 209 KB
english, 2001
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