Infrared study of carbon incorporation during chemical...

Applied Surface Science 2001 Vol. 175-176; Iss. none

Infrared study of carbon incorporation during chemical vapor deposition of SiC using methylsilanes

Masanori Shinohara, Yasuo Kimura, Daisei Shoji, Michio Niwano
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Volume:
175-176
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(01)00137-4
File:
PDF, 164 KB
english, 2001
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