Characterization of the surface layer of GaAs nitrided by high-density plasma
Kanji Yasui, Yuko Tsukada, Tatsuro Arayama, Satoshi Okutani, Tadashi AkahaneVolume:
175-176
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(01)00166-0
File:
PDF, 153 KB
english, 2001