Vibrational modes of MEMS resonators

S. G. Lokhre, K. Virwani, B. Gajanan, S. P. Pai, P. R. Apte, V. I. Pustovoy, V. K. Jain

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Language:

english

DOI:

10.1117/12.369473

File:

PDF, 486 KB

english

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