Heteroepitaxy of 3C–SiC by electron cyclotron resonance-CVD technique
P. Mandracci, A. Chiodoni, G. Cicero, S. Ferrero, F. Giorgis, C.F. Pirri, G. Barucca, P. Musumeci, R. ReitanoVolume:
184
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(01)00474-3
File:
PDF, 269 KB
english, 2001