Surface preparation of 4H–SiC substrates for hot-wall CVD of SiC layers
G. Wagner, J. Doerschel, A. GerlitzkeVolume:
184
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00477-9
File:
PDF, 427 KB
english, 2001