Dry etch chemistries for TiO2 thin films

S. Norasetthekul, P.Y. Park, K.H. Baik, K.P. Lee, J.H. Shin, B.S. Jeong, V. Shishodia, E.S. Lambers, D.P. Norton, S.J. Pearton

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Volume:

185

Year:

2001

Language:

english

Pages:

DOI:

10.1016/s0169-4332(01)00562-1

File:

PDF, 321 KB

english, 2001

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