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Dry etch chemistries for TiO2 thin films
S. Norasetthekul, P.Y. Park, K.H. Baik, K.P. Lee, J.H. Shin, B.S. Jeong, V. Shishodia, E.S. Lambers, D.P. Norton, S.J. PeartonVolume:
185
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(01)00562-1
File:
PDF, 321 KB
english, 2001