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Correlation between photoluminescence in the gas phase and growth kinetics during laser induced chemical vapor deposition of silicon nitride thin films
Shoshana Tamir, Shlomo Berger, Naser Shakour, Shammai SpeiserVolume:
186
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00602-x
File:
PDF, 81 KB
english, 2002