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Real-time diagnostics of growth of germanium nanocrystallites on partially hydrogen-terminated silicon surfaces by spectroscopic ellipsometry
F. Schmitt, A.V. Osipov, P. HessVolume:
188
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(01)00708-5
File:
PDF, 208 KB
english, 2002