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Morphology and composition of ArF excimer laser deposited carbon nitride films as determined by analytical TEM
O. Geszti, G. Radnóczi, I. Bertóti, T. Szörényi, F. Antoni, E. FogarassyVolume:
186
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00758-9
File:
PDF, 350 KB
english, 2002