Morphology and composition of ArF excimer laser deposited...

Morphology and composition of ArF excimer laser deposited carbon nitride films as determined by analytical TEM

O. Geszti, G. Radnóczi, I. Bertóti, T. Szörényi, F. Antoni, E. Fogarassy
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Volume:
186
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00758-9
File:
PDF, 350 KB
english, 2002
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