Optical and thermal characterization of AlN thin films...

Applied Surface Science 2002 Vol. 186; Iss. 1-4

Optical and thermal characterization of AlN thin films deposited by pulsed laser deposition

A. Jacquot, B. Lenoir, A. Dauscher, P. Verardi, F. Craciun, M. Stölzer, M. Gartner, M. Dinescu
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Volume:
186
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(01)00767-x
File:
PDF, 89 KB
english, 2002
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