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Formation of AlxGa1−xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE
Junichiro Takeda, Masashi Akabori, Junichi Motohisa, Takashi FukuiVolume:
190
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(01)00886-8
File:
PDF, 341 KB
english, 2002